Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230497 | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process | Atsuki Fukazawa | 2025-02-18 |
| 12031205 | Method and system for forming a conformal silicon carbon nitride layer and structure formed using same | Ling Chi Hwang, Makoto Igarashi | 2024-07-09 |
| 11610774 | Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process | Atsuki Fukazawa | 2023-03-21 |
| 10910262 | Method of selectively depositing a capping layer structure on a semiconductor device structure | Akiko Kobayashi, Dai Ishikawa | 2021-02-02 |
| 9947582 | Processes for preventing oxidation of metal thin films | Shang Chen, Takahiro Onuma, Dai Ishikawa | 2018-04-17 |