Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7128804 | Corrosion resistant component of semiconductor processing equipment and method of manufacture thereof | Robert O'Donnell, John Daugherty | 2006-10-31 |
| 6826640 | Bus bandwidth control system | — | 2004-11-30 |
| 6805952 | Low contamination plasma chamber components and methods for making the same | Robert Steger | 2004-10-19 |
| 6790242 | Fullerene coated component of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, John Daugherty | 2004-09-14 |
| 6773751 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, John Daugherty | 2004-08-10 |
| 6620520 | Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof | Robert O'Donnell, John Daugherty | 2003-09-16 |
| 6613442 | Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, John Daugherty | 2003-09-02 |
| 6537429 | Diamond coatings on reactor wall and method of manufacturing thereof | Robert O'Donnell, John Daugherty | 2003-03-25 |
| 6533910 | Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof | Robert O'Donnell, John Daugherty | 2003-03-18 |