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| 7910885 |
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| 7223974 |
Charged particle beam column and method for directing a charged particle beam |
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2007-05-29 |
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Charged particle beam column and method of its operation |
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| 7034297 |
Method and system for use in the monitoring of samples with a charged particle beam |
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Deflection method and system for use in a charged particle beam column |
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| 6674075 |
Charged particle beam apparatus and method for inspecting samples |
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