Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7718548 | Selective copper-silicon-nitride layer formation for an improved dielectric film/copper line interface | Sang-Mok Lee, Vladimir Zubkov, Meiyee Shek, Li-Qun Xia, Hichem M'Saad | 2010-05-18 | $6,103,000 |