Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7848898 | Method for monitoring process drift using plasma characteristics | Steven C. Shannon, Daniel J. Hoffman, Jeremiah T. Pender | 2010-12-07 |
| 7620511 | Method for determining plasma characteristics | Steven C. Shannon, Daniel J. Hoffman, Jeremiah T. Pender | 2009-11-17 |
| 7440859 | Method for determining plasma characteristics | Steven C. Shannon, Daniel J. Hoffman, Jeremiah T. Pender | 2008-10-21 |
| 7286948 | Method for determining plasma characteristics | Steven C. Shannon, Daniel J. Hoffman, Jeremiah T. Pender | 2007-10-23 |