Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7794544 | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system | Son T. Nguyen, Kedarnath Sangam, Miriam Schwartz, Kenric Choi, Sanjay Bhat +4 more | 2010-09-14 |