Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11821070 | Ruthenium film deposition using low valent metal precursors | Muthukumar Kaliappan, Jeffrey W. Anthis, Michael Haverty | 2023-11-21 |
| 11332488 | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use | Jeffrey W. Anthis, Atashi Basu, David Thompson | 2022-05-17 |
| 10790188 | Seamless ruthenium gap fill | Jeffrey W. Anthis, David Thompson | 2020-09-29 |
| 10752649 | Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use | Jeffrey W. Anthis, Atashi Basu, David Thompson | 2020-08-25 |