Issued Patents All Time
Showing 51–60 of 60 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7221993 | Systems and methods for transferring small lot size substrate carriers between processing tools | Michael R. Rice, Eric A. Englhardt, Vinay Shah, Robert B. Lowrance, Jeffrey C. Hudgens | 2007-05-22 |
| 7168553 | Dynamically balanced substrate carrier handler | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Jeffrey C. Hudgens | 2007-01-30 |
| 7156221 | Break-away positioning conveyor mount for accommodating conveyor belt bends | Michael R. Rice, Eric A. Englhardt, Robert B. Lowrance, Jeffrey C. Hudgens | 2007-01-02 |
| 7077264 | Methods and apparatus for transporting substrate carriers | Michael R. Rice, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2006-07-18 |
| 6955197 | Substrate carrier having door latching and substrate clamping mechanisms | Michael R. Rice, Robert B. Lowrance, Jeffrey C. Hudgens, Eric A. Englhardt | 2005-10-18 |
| 6745908 | Shelf module adapted to store substrate carriers | — | 2004-06-08 |
| 6582175 | Robot for handling semiconductor wafers | Damon K. Cox, Chris Pencis, Jeffrey C. Hudgens, Michael R. Rice | 2003-06-24 |
| 6573522 | Locator pin integrated with sensor for detecting semiconductor substrate carrier | Jeffrey C. Hudgens | 2003-06-03 |
| 6379095 | Robot for handling semiconductor wafers | Jeffrey C. Hudgens, Chris Pencis, Damon K. Cox | 2002-04-30 |
| 4604934 | Carriage train precision linear positioning system | Dwight A. Bollinger, Kris B. Curry, Daniel C. Plocik | 1986-08-12 |