Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10345250 | Method of inspecting a sample with a charged particle beam device, and charged particle beam device | Bernhard Mueller, Kulpreet Singh VIRDI, Bernhard Schuler, Robert Trauner | 2019-07-09 |
| 10109451 | Apparatus configured for enhanced vacuum ultraviolet (VUV) spectral radiant flux and system having the apparatus | Georg JOST, Bernhard Mueller, George Tzeng | 2018-10-23 |
| 7786742 | Prober for electronic device testing on large area substrates | Sriram Krishnaswami, Matthias Brunner, William Beaton, Yong Liu, Benjamin M. Johnston +2 more | 2010-08-31 |