Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11687008 | Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof | Bernhard Mueller, Bernhard Schuler, Peter C. Staffansson, Kulpreet Singh VIRDI, Volker Daiker | 2023-06-27 |
| 11610755 | Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample | Bernhard Schuler, Bernhard Mueller, Nikolai KNAUB, Kulpreet Singh VIRDI | 2023-03-21 |
| 11195691 | Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample | Bernhard Schuler, Bernhard Mueller, Nikolai KNAUB, Kulpreet Singh VIRDI | 2021-12-07 |
| 10345250 | Method of inspecting a sample with a charged particle beam device, and charged particle beam device | Bernhard Mueller, Kulpreet Singh VIRDI, Bernhard Schuler, Ludwig Ledl | 2019-07-09 |