| 11687008 |
Method for automated critical dimension measurement on a substrate for display manufacturing, method of inspecting a large area substrate for display manufacturing, apparatus for inspecting a large area substrate for display manufacturing and method of operating thereof |
Bernhard Mueller, Bernhard Schuler, Peter C. Staffansson, Kulpreet Singh VIRDI, Volker Daiker |
2023-06-27 |
| 11610755 |
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample |
Bernhard Schuler, Bernhard Mueller, Nikolai KNAUB, Kulpreet Singh VIRDI |
2023-03-21 |
| 11195691 |
Method of automatically focusing a charged particle beam on a surface region of a sample, method of calculating a converging set of sharpness values of images of a charged particle beam device and charged particle beam device for imaging a sample |
Bernhard Schuler, Bernhard Mueller, Nikolai KNAUB, Kulpreet Singh VIRDI |
2021-12-07 |
| 10345250 |
Method of inspecting a sample with a charged particle beam device, and charged particle beam device |
Bernhard Mueller, Kulpreet Singh VIRDI, Bernhard Schuler, Ludwig Ledl |
2019-07-09 |
