Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496190 | Feedback of layer thickness timing and clearance timing for polishing control | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang +1 more | 2016-11-15 |
| 8989890 | GST film thickness monitoring | Kun Xu, Feng Q. Liu, Dominic J. Benvegnu, Boguslaw A. Swedek, Yuchun Wang +1 more | 2015-03-24 |