Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315733 | Enhanced etch selectivity using halides | David Knapp, Feng Qiao, Hailong Zhou, Junkai He, Qian Fu +2 more | 2025-05-27 |
| 11742212 | Directional deposition in etch chamber | Zhongkui Tan, Lisi Xie, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath +3 more | 2023-08-29 |