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Lam Research: 1 patents #1,364 of 2,128Top 65%
📍 Fremont, CA: #6,509 of 9,298 inventorsTop 75%
🗺 California: #247,236 of 386,348 inventorsTop 65%
Overall (All Time): #2,603,304 of 4,157,543Top 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11742212 Directional deposition in etch chamber Zhongkui Tan, Yoko Yamaguchi, Yasushi Ishikawa, Patrick Ponath, Sung Jin Jung +3 more 2023-08-29