Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732342 | Method to increase the compressive stress of PECVD silicon nitride films | Mihaela Balseanu, Li-Qun Xia, Vladimir Zubkov, Mei-Yee Shek, Hichem M'Saad | 2010-06-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7732342 | Method to increase the compressive stress of PECVD silicon nitride films | Mihaela Balseanu, Li-Qun Xia, Vladimir Zubkov, Mei-Yee Shek, Hichem M'Saad | 2010-06-08 |