Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694879 | Component, method of manufacturing the component, and method of cleaning the component | Ian Widlow, Govinda Raj, Aravind Dugganna Naik, Francisco Rodarte, Sudhir Gondhalekar +1 more | 2023-07-04 |
| 11380557 | Apparatus and method for gas delivery in semiconductor process chambers | Vincent Kirchhoff, Faruk Gungor, Felix Rabinovich | 2022-07-05 |