Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7355394 | Apparatus and method of dynamically measuring thickness of a layer of a substrate | Lawrence Chung-Lai Lei, Siqing Lu, Yu-Chia Chang, Cecilia Martner, Quyen Pham +3 more | 2008-04-08 |