Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7422774 | Method for forming ultra low k films using electron beam | Yi Zheng, Srinivas D. Nemani, Li-Qun Xia, Kang Sub Yim | 2008-09-09 |
| 7060330 | Method for forming ultra low k films using electron beam | Yi Zheng, Srinivas D. Nemani, Li-Qun Xia, Kang Sub Yim | 2006-06-13 |
| 7056560 | Ultra low dielectric materials based on hybrid system of linear silicon precursor and organic porogen by plasma-enhanced chemical vapor deposition (PECVD) | Kang Sub Yim, Yi Zheng, Srinivas D. Nemani, Li-Qun Xia | 2006-06-06 |