Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471833 | High etch rate method for plasma etching silicon nitride | Ajay Kumar, Jeffrey D. Chin, Dragan Podlesnik | 2002-10-29 |
| 6391788 | Two etchant etch method | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2002-05-21 |
| 6380095 | Silicon trench etch using silicon-containing precursors to reduce or avoid mask erosion | Wei Liu, Yiqiong Wang, Maocheng Li, Shaoher X. Pan, Dragan Podlesnik | 2002-04-30 |
| 6372655 | Two etchant etch method | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2002-04-16 |
| 6318384 | Self cleaning method of forming deep trenches in silicon substrates | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2001-11-20 |
| 6303513 | Method for controlling a profile of a structure formed on a substrate | Ajay Kumar, Dragan Podlesnik, Jeffrey D. Chinn | 2001-10-16 |
| 6270634 | Method for plasma etching at a high etch rate | Ajay Kumar, Jeffrey D. Chinn, Dragan Podlesnik | 2001-08-07 |