Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9395266 | On-tool wavefront aberrations measurement system and method | Boris Golberg, Amir Sagiv, Haim Feldman, Uriel Malul | 2016-07-19 |
| 8659754 | Inspection system and method for fast changes of focus | Haim Feldman, Boris Morgenstein, Roman Naidis | 2014-02-25 |
| 8488117 | Inspection system and method for fast changes of focus | Haim Feldman, Boris Morgenstein, Roman Naidis | 2013-07-16 |
| 8207504 | Inspection of EUV masks by a DUV mask inspection tool | Chaim Braude, Mariano Abramson, Jimmy Vishnipolsky, Yuri Belenky | 2012-06-26 |
| 7315364 | System for inspecting a surface employing configurable multi angle illumination modes | Boris Golberg | 2008-01-01 |
| 7239389 | Determination of irradiation parameters for inspection of a surface | Ditza Auerbach | 2007-07-03 |