Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6296710 | Multi-port gas injector for a vertical furnace used in semiconductor processing | Michael Allen, Richard A. Anundson | 2001-10-02 |
| 6263590 | Method and apparatus for controlling byproduct induced defect density | Mark E. Culp, Allan T. Nelson | 2001-07-24 |
| 6159812 | Reduced boron diffusion by use of a pre-anneal | Jon D. Cheek, Derick J. Wristers | 2000-12-12 |