Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Method and apparatus for controlling byproduct induced defect density

Method and apparatus for controlling byproduct induced defect density

US Patent 6263590 · Granted Jul 24, 2001

Estimated economic value: $3,903,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Method of operating a processing chamber used in forming electronic devices2015
Advanced process control of thermal oxidation processes, and systems for accompl2007
Multi-port gas injector for a vertical furnace used in semiconductor processing2001
Modified thermocouple mounting bushing and system including the same2001
Reduced boron diffusion by use of a pre-anneal2000