Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6147507 | System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer | Sunil N. Shabde, Yowjuang W. Liu | 2000-11-14 |
| 6053034 | Method for measuring fracture toughness of thin films | Young-Chang Joo | 2000-04-25 |
| 6023327 | System and method for detecting defects in an interlayer dielectric of a semiconductor device | Sunil N. Shabde, Yowjuang W. Liu | 2000-02-08 |