Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8664115 | Copper interconnect with metal hardmask removal | Christin Bartsch | 2014-03-04 |
| 8110498 | Method for passivating exposed copper surfaces in a metallization layer of a semiconductor device | Matthias Schaller, Daniel Fischer | 2012-02-07 |