Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5757673 | Automated data management system for analysis and control of photolithography stepper performance | Anastasia L. Osheiski, Paul Ackmann, Richard D. Edwards | 1998-05-26 |
| 5586059 | Automated data management system for analysis and control of photolithography stepper performance | Anastasia Lynn Oshelski, Paul Ackmann, Richard D. Edwards | 1996-12-17 |