Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368884 | Die-based in-fab process monitoring and analysis system for semiconductor processing | Greg Goodwin | 2002-04-09 |
| 5586059 | Automated data management system for analysis and control of photolithography stepper performance | Paul Ackmann, Stu Brown, Richard D. Edwards | 1996-12-17 |