Issued Patents All Time
Showing 51–54 of 54 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6622111 | Wafer rotation in semiconductor processing | Michael R. Conboy, Elfido Coss, Jr. | 2003-09-16 |
| 6440821 | Method and apparatus for aligning wafers | Michael R. Conboy, Elfido Coss, Jr. | 2002-08-27 |
| 6427095 | Universal multi-tool adapter for reconfiguring a wafer processing line | Michael R. Conboy, Russel Shirley | 2002-07-30 |
| 6213708 | System for sorting multiple semiconductor wafers | — | 2001-04-10 |