Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6071824 | Method and system for patterning to enhance performance of a metal layer of a semiconductor device | Bhanwar Singh, Subhash Gupta, Susan H. Chen | 2000-06-06 |
| 5910453 | Deep UV anti-reflection coating etch | Subhash Gupta | 1999-06-08 |