Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8357268 | System for driving and controlling a movable electrode assembly in an electrochemical process tool | Michael Pietzner, Mario Illgen, Frank Kuechenmeister | 2013-01-22 |
| 7993936 | System and method for controlling an electrochemical etch process | Niels Rackwitz, Joern Schnapke, Frank Kuechenmeister | 2011-08-09 |
| 7585759 | Technique for efficiently patterning an underbump metallization layer using a dry etch process | Frank Kuechenmeister, Alexander Platz, Gotthard Jungnickel | 2009-09-08 |