Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6455130 | Nanoporous dielectric films with graded density and process for making such films | Stephen Wallace, Douglas M. Smith, Kevin Roderick, James Drage | 2002-09-24 |
| 6410149 | Silane-based nanoporous silica thin films and precursors for making same | Neil H. Hendricks, Douglas M. Smith, Stephen Wallace, James Drage | 2002-06-25 |
| 6395651 | Simplified process for producing nanoporous silica | Douglas M. Smith, Kevin Roderick, Stephen Wallace, James Drage, Hui-Jung Wu +2 more | 2002-05-28 |
| 6380105 | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Richard Stoltz, Alok Maskara +2 more | 2002-04-30 |
| 6372666 | Process for producing dielectric thin films | Douglas M. Smith, James Drage, Rick J. Roberts | 2002-04-16 |
| 6335296 | Deposition of nanoporous silica films using a closed cup coater | Neil H. Hendricks, Douglas M. Smith, James Drage | 2002-01-01 |
| 6318124 | Nanoporous silica treated with siloxane polymers for ULSI applications | Nicole Rutherford, James Drage, Ron Katsanes, Hui-Jung Wu | 2001-11-20 |
| 6319855 | Deposition of nanoporous silic films using a closed cup coater | Neil H. Hendricks, Douglas M. Smith, James Drage | 2001-11-20 |
| 6208014 | Use of multifunctional reagents for the surface modification of nanoporous silica films | Hui-Jung Wu, James Drage, Douglas M. Smith, Stephen Wallace, Neil Viernes | 2001-03-27 |
| 6159295 | Limited-volume apparatus for forming thin film aerogels on semiconductor substrates | Alok Maskara, Douglas M. Smith | 2000-12-12 |
| 6140254 | Edge bead removal for nanoporous dielectric silica coatings | Denis Endisch, Hui-Jung Wu | 2000-10-31 |
| 6126733 | Alcohol based precursors for producing nanoporous silica thin films | Stephen Wallace, James Drage, Douglas M. Smith | 2000-10-03 |
| 6090448 | Polyol-based precursors for producing nanoporous silica thin films | Stephen Wallace, James Drage, Douglas M. Smith | 2000-07-18 |
| 6048804 | Process for producing nanoporous silica thin films | Douglas M. Smith, Kevin Roderick, Stephen Wallace | 2000-04-11 |
| 6037275 | Nanoporous silica via combined stream deposition | Hui-Jung Wu, James Drage, Lisa Brungardt, Douglas M. Smith | 2000-03-14 |
| 6037277 | Limited-volume apparatus and method for forming thin film aerogels on semiconductor substrates | Alok Masakara, Douglas M. Smith | 2000-03-14 |
| 6022812 | Vapor deposition routes to nanoporous silica | Douglas M. Smith, Kevin Roderick | 2000-02-08 |
| 5955140 | Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates | Douglas M. Smith, Gregory P. Johnston, William C. Ackerman, Richard Stoltz, Alok Maskara +2 more | 1999-09-21 |