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Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates |
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Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates |
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Nanoporous dielectric thin film formation using a post-deposition catalyst |
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2001-11-20 |
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Aerogel thin film formation from multi-solvent systems |
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2000-05-16 |
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Low volatility solvent-based method for forming thin film nanoporous aerogels on semiconductor substrates |
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1998-05-19 |