Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8089622 | Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers | Andreas Birkner, Wolfgang Vollrath | 2012-01-03 |
| 8087799 | Illumination means and inspection means having an illumination means | Kurt Hahn, Christof Krampe-Zadler | 2012-01-03 |
| 7490714 | Transport device, in particular for use in a vacuum chamber | Jochen Krause | 2009-02-17 |
| 7463341 | Method and apparatus for detecting wind velocities by means of a doppler-lidar system | Thorsteinn Halldorsson, Gerald Sobotta | 2008-12-09 |
| 6942768 | Vacuum coating apparatus | Wolfgang Erbkamm, Hans Hecht, Falk Milde | 2005-09-13 |
| 6429420 | Reversing aid | Ulrich Babst, Peter Nave | 2002-08-06 |
| 5119201 | Line camera for imaging object strips on photosensitive detector lines | Fritz Blechinger | 1992-06-02 |