Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566269 | Removal of post etch residuals on wafer surface | Peter Biles, Mario Pita, Lauri Monica Nelson, Robert H. Mills | 2003-05-20 |
| 6406999 | Semiconductor device having reduced line width variations between tightly spaced and isolated features | Thomas Craig Esry, Nace Layadi, Simon John Molloy, Mario Pita | 2002-06-18 |
| 6395639 | Process for improving line width variations between tightly spaced and isolated features in integrated circuits | Thomas Craig Esry, Nace Layadi, Simon John Molloy, Mario Pita | 2002-05-28 |