Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6566269 | Removal of post etch residuals on wafer surface | Mario Pita, Sylvia Marci Luque, Lauri Monica Nelson, Robert H. Mills | 2003-05-20 | $17,694,000 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6566269 | Removal of post etch residuals on wafer surface | Mario Pita, Sylvia Marci Luque, Lauri Monica Nelson, Robert H. Mills | 2003-05-20 | $17,694,000 |