Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439972 | Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method | Pradip K. Roy, Sundar Chetlur, Vivek Saxena | 2002-08-27 |
| 6436807 | Method for making an interconnect layer and a semiconductor device including the same | Donald Thomas Cwynar, Dennis Okumu Ouma, Vivek Saxena, John Sharpe | 2002-08-20 |
| 6436830 | CMP system for polishing semiconductor wafers and related method | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-08-20 |
| 6410419 | Silicon carbide barrier layers for porous low dielectric constant materials | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-06-25 |
| 6375541 | Polishing fluid polishing method semiconductor device and semiconductor device fabrication method | Sailesh Mansinh Merchant, Pradip K. Roy, Hem M. Vaidya | 2002-04-23 |
| 6368200 | Polishing pads from closed-cell elastomer foam | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-04-09 |
| 6364744 | CMP system and slurry for polishing semiconductor wafers and related method | Sailesh Mansinh Merchant, Pradip K. Roy | 2002-04-02 |
| 6328633 | Polishing fluid, polishing method, semiconductor device and semiconductor device fabrication method | Pradip K. Roy, Sundar Chetlur, Vivek Saxena | 2001-12-11 |
| 6319095 | Colloidal suspension of abrasive particles containing magnesium as CMP slurry | Sailesh Mansinh Merchant, Pradip K. Roy | 2001-11-20 |
| 6312565 | Thin film deposition of mixed metal oxides | Pradip K. Roy | 2001-11-06 |
| 6293847 | Apparatus for chemical mechanical polishing endpoint detection using a hydrogen sensor | William Easter, John A. Maze, Frank Miceli, Allen Yen | 2001-09-25 |
| 6287970 | Method of making a semiconductor with copper passivating film | Sailesh Mansinh Merchant, William M. Moller, Pradip K. Roy | 2001-09-11 |
| 6274429 | Use of Si-rich oxide film as a chemical potential barrier for controlled oxidation | — | 2001-08-14 |
| 6258231 | Chemical mechanical polishing endpoint apparatus using component activity in effluent slurry | William Easter, Pradip K. Roy, Susan Clay Vitkavage | 2001-07-10 |
| 6214732 | Chemical mechanical polishing endpoint detection by monitoring component activity in effluent slurry | William Easter, Pradip K. Roy, Susan Clay Vitkavage | 2001-04-10 |
| 6130150 | Method of making a semiconductor device with barrier and conductor protection | Sailesh Mansinh Merchant, Pradip K. Roy | 2000-10-10 |
| 6114234 | Method of making a semiconductor with copper passivating film | Sailesh Mansinh Merchant, Pradip K. Roy | 2000-09-05 |
| 6100587 | Silicon carbide barrier layers for porous low dielectric constant materials | Sailesh Mansinh Merchant, Pradip K. Roy | 2000-08-08 |
| 6071808 | Method of passivating copper interconnects in a semiconductor | Sailesh Mansinh Merchant, Pradip K. Roy | 2000-06-06 |