Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371878 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Chongying Xu, Thomas H. Baum | 2008-05-13 |
| 7198815 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Chongying Xu, Thomas H. Baum | 2007-04-03 |
| 6960675 | Tantalum amide complexes for depositing tantalum-containing films, and method of making same | Chongying Xu, Thomas H. Baum | 2005-11-01 |