Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7119052 | Compositions and methods for high-efficiency cleaning/polishing of semiconductor wafers | Chongying Xu, Thomas H. Baum, David W. Minsek, Eliodor G. Ghenciu | 2006-10-10 |
| 7119418 | Supercritical fluid-assisted deposition of materials on semiconductor substrates | Chongying Xu, Thomas H. Baum | 2006-10-10 |
| 7011716 | Compositions and methods for drying patterned wafers during manufacture of integrated circuitry products | Chongying Xu, Thomas H. Baum, Alexander Borovik, Eliodor G. Ghenciu | 2006-03-14 |
| 6989358 | Supercritical carbon dioxide/chemical formulation for removal of photoresists | Eliodor G. Ghenciu, Chongying Xu, Thomas H. Baum | 2006-01-24 |
| 6943139 | Removal of particle contamination on patterned silicon/silicon dioxide using supercritical carbon dioxide/chemical formulations | Eliodor G. Ghenciu, Chongying Xu, Thomas H. Baum | 2005-09-13 |
| 6735978 | Treatment of supercritical fluid utilized in semiconductor manufacturing applications | Glenn M. Tom, Eliodor G. Ghenciu, Chongying Xu, Thomas H. Baum | 2004-05-18 |