Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11349414 | Apparatus and method for monitoring the relative relationship between the wafer and the chuck | Te-Min Wang, Chun-Chieh Lin, Chien-Chung Hou, Cheng-Mao Chien | 2022-05-31 |
| 11062926 | Wafer charges monitoring | Chih-Chiang Wu, Chun-Chin Kang, Chien-Ta Feng | 2021-07-13 |
| 10984524 | Calibration system with at least one camera and method thereof | Chien-Li Chen, Chien-Cheng Kuo, Te-Min Wang | 2021-04-20 |
| 10804821 | Apparatus and method for monitoring the relative relationship between the wafer and the chuck | Te-Min Wang, Chun-Chieh Lin, Chien-Chung Hou, Cheng-Mao Chien | 2020-10-13 |
| 10699876 | Method of cleaning electrostatic chuck | Chun-Chin Kang, Chieh-Jen Yang | 2020-06-30 |
| 10475678 | Wafer charges monitoring | Chih-Chiang Wu, Chun-Chin Kang, Chien-Ta Feng | 2019-11-12 |