Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062926 | Wafer charges monitoring | Chih-Chiang Wu, Yu-Ho Ni, Chien-Ta Feng | 2021-07-13 |
| 10699876 | Method of cleaning electrostatic chuck | Yu-Ho Ni, Chieh-Jen Yang | 2020-06-30 |
| 10475678 | Wafer charges monitoring | Chih-Chiang Wu, Yu-Ho Ni, Chien-Ta Feng | 2019-11-12 |