Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11349414 | Apparatus and method for monitoring the relative relationship between the wafer and the chuck | Te-Min Wang, Yu-Ho Ni, Chun-Chieh Lin, Cheng-Mao Chien | 2022-05-31 |
| 10804821 | Apparatus and method for monitoring the relative relationship between the wafer and the chuck | Te-Min Wang, Yu-Ho Ni, Chun-Chieh Lin, Cheng-Mao Chien | 2020-10-13 |