Issued Patents 2025
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12407078 | Tuner, and impedance matching method | Eiki KAMATA | 2025-09-02 |
| 12362151 | Plasma processing apparatus and plasma processing method | Toshifumi KITAHARA, Satoru Kawakami | 2025-07-15 |
| 12338532 | Plasma processing method and plasma processing apparatus | Eiki KAMATA, Yoshiyuki Kondo | 2025-06-24 |
| 12340977 | Plasma source and plasma processing apparatus | Kenta Kato | 2025-06-24 |
| 12315700 | Plasma processing apparatus and ceiling wall | Satoshi Itoh, Masashi Imanaka, Eiki KAMATA, Shigenori Ozaki, Soudai EMORI | 2025-05-27 |
| 12283465 | Plasma processing apparatus and plasma processing method | Eiki KAMATA, Satoru Kawakami, Takumi Kabe | 2025-04-22 |
| 12261025 | Plasma processing apparatus | Satoru Kawakami | 2025-03-25 |
| 12243716 | Plasma processing apparatus | Toshifumi KITAHARA | 2025-03-04 |
| 12243718 | Plasma processing method and plasma processing apparatus | Eiki KAMATA, Mikio Sato, Nobuhiko Yamamoto | 2025-03-04 |
| 12237157 | Plasma measurement method | Eiki KAMATA, Mikio Sato, Mitsutoshi ASHIDA | 2025-02-25 |
| 12205800 | Plasma processing apparatus and plasma processing method | Haruhiko Furuya | 2025-01-21 |