SO

Shigenori Ozaki

TL Tokyo Electron Limited: 1 patents #256 of 785Top 35%
Overall (2025): #216,675 of 469,880Top 50%
1
Patents 2025

Issued Patents 2025

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
12315700 Plasma processing apparatus and ceiling wall Satoshi Itoh, Masashi Imanaka, Eiki KAMATA, Taro Ikeda, Soudai EMORI 2025-05-27