EK

Eiki KAMATA

TL Tokyo Electron Limited: 7 patents #13 of 785Top 2%
📍 Yamanashi, JP: #2 of 236 inventorsTop 1%
Overall (2025): #12,986 of 469,880Top 3%
7
Patents 2025

Issued Patents 2025

Showing 1–7 of 7 patents

Patent #TitleCo-InventorsDate
12412732 Plasma processing apparatus Kazushi Kaneko, Satoru Kawakami 2025-09-09
12407078 Tuner, and impedance matching method Taro Ikeda 2025-09-02
12338532 Plasma processing method and plasma processing apparatus Taro Ikeda, Yoshiyuki Kondo 2025-06-24
12315700 Plasma processing apparatus and ceiling wall Satoshi Itoh, Masashi Imanaka, Taro Ikeda, Shigenori Ozaki, Soudai EMORI 2025-05-27
12283465 Plasma processing apparatus and plasma processing method Taro Ikeda, Satoru Kawakami, Takumi Kabe 2025-04-22
12243718 Plasma processing method and plasma processing apparatus Mikio Sato, Taro Ikeda, Nobuhiko Yamamoto 2025-03-04
12237157 Plasma measurement method Mikio Sato, Taro Ikeda, Mitsutoshi ASHIDA 2025-02-25