HF

Haruhiko Furuya

TL Tokyo Electron Limited: 2 patents #126 of 785Top 20%
Overall (2025): #123,796 of 469,880Top 30%
2
Patents 2025

Issued Patents 2025

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
12347649 Plasma processing apparatus and lid member Hiroshi Kondo 2025-07-01
12205800 Plasma processing apparatus and plasma processing method Taro Ikeda 2025-01-21