Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334309 | Filter device and plasma processing apparatus | Nozomu Nagashima | 2025-06-17 |
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Namkyun Kim, Seungbo Shim, Donghyeon Na, Dongseok Han +3 more | 2025-02-11 |
| 12210045 | Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig | Byeongsang Kim, Dougyong Sung, Sungjin Kim, Yunhwan Kim, Inseok Seo +2 more | 2025-01-28 |