Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424412 | Apparatus for providing RF power and operating method thereof | Siyoung Koh, Hadong JIN, Seungbo Shim, Sungyong Lim, Sungyeol Kim | 2025-09-23 |
| 12222362 | Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing wafer | Yoonbum Nam, Seungbo Shim, Donghyeon Na, Naohiko Okunishi, Dongseok Han +3 more | 2025-02-11 |