Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424412 | Apparatus for providing RF power and operating method thereof | Siyoung Koh, Hadong JIN, Namkyun Kim, Seungbo Shim, Sungyeol Kim | 2025-09-23 |
| 12368022 | RF generating device and semiconductor manufacturing apparatus including the same | Sungyeol Kim, Yongwon Cho, Younghwan Choi, Chunyoon Park, Seungbo Shim +2 more | 2025-07-22 |
| 12288674 | Hybrid matcher and radio frequency matching system including the hybrid matcher | Hyosin KIM, Minsung Kim, Dongyub Kim, Sungyeol Kim, Jongbeom MOON +1 more | 2025-04-29 |