Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Je-Hun WOO, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2025-06-10 |
| 12210045 | Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig | Byeongsang Kim, Sungjin Kim, Yunhwan Kim, Inseok Seo, Seungbo Shim +2 more | 2025-01-28 |