Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327709 | Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same | Dong-Hyub Lee, Dougyong Sung, Bongseong KIM, Juho Lee, Yun-Kwang Jeon +1 more | 2025-06-10 |