Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12210045 | Impedance measurement jig and method of controlling a substrate-processing apparatus using the jig | Byeongsang Kim, Dougyong Sung, Sungjin Kim, Yunhwan Kim, Seungbo Shim +2 more | 2025-01-28 |