Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12417928 | Substrate processing method and substrate processing system | Takeo Nakano, Hirokazu Ueda, Ryuichi Asako, Naoki UMESHITA | 2025-09-16 |
| 12406862 | Vacuum processing apparatus and oxidizing gas removal method | Hirokazu Ueda, Yoji IIZUKA, Antonio Luis Pacheco Rotondaro, Dipak Aryal, Takeo Nakano +5 more | 2025-09-02 |
| 12276027 | Substrate processing apparatus and substrate processing method | Katsuhiro Morikawa, Masami Akimoto, Satoshi Kaneko | 2025-04-15 |
| 12247768 | Electrocaloric effect element, heat transfer device, semiconductor manufacturing device, and electrocaloric effect element control method | Koji Akiyama, Hiroyuki Nagai, Hirokazu Ueda | 2025-03-11 |